|
| |
YES-3TA |
YES-5TA |
CLEANLINESS
(Typical Results) |
less than 10x1-micron particles per
4-inch wafer |
less than 5x1-micron particles per
6-inch wafer |
| CAPACITY: |
Vapor Prime 8 cassettes of 4-inch
wafers |
8 cassettes of 5 or 6-inch
wafers
or 12 cassettes of 4-inch wafers |
| Vapor Prime Image
Reversal |
(Model
YES-310TA)
above listed Vapor Prime capacity, or Image
Reversal on 4 cassettes of 4-inch wafers. |
(Model
YES-58TA)
above listed Vapor Prime capacity or Image
Reversal on 4 cassettes of 5 or 6-inch wafers or 6 cassettes of 4-inch
wafers |
| Vapor Prime Image
Reversal Silylation |
|
(YES-58TASM)
above listed capacities for Vapor Prime and
Image Reversal or Silylation on 4 cassettes of 5 or 6-inch wafers or 6
cassettes of 4-inch wafers |
| THROUGHPUT |
2 full loads/hr |
2 full loads/hr |
| HMDS USAGE |
< 4ml/200 wafers(120 prime
cycles/pint) |
< 5ml/200 wafers(75 prime
cycles/pint) |
| TEMPERATURE STABILITY |
160°C max± 5°C |
160°C max ± 5°C |
| DIMENSIONS: Chamber |
12-in (305mm) High
12-in (305mm)
Wide
13.25-in (336mm) Deep |
16-in (406mm) High 16-in (406mm)
Wide18-in (406mm) Deep |
| DIMENSIONS: System |
27.5-in (699mm) High23.75-in (603mm)
Wide19.5-in (495mm) Deep |
31.75-in (806mm) High27.75-in
(705mm) Wide23-in (584mm) Deep |
| WEIGHT Stand-Alone |
170 pounds |
245 pounds |
WEIGHT Int'l Shipping
(Includes
Crate) |
460 pounds |
510 pounds |
POWER: System
Vacuum Pump |
115V, 60Hz, 1 Phase 10.5A
or
230V,
50Hz, 1 Phase, 5.3A,
115V, 60Hz, 1 Phase, 7A or
230V, 50Hz, 1 Phase,
3.5A |
115V, 60Hz, 1 Phase, 14A
or
230V, 50
Hz, 1 Phase, 7A,
115V, 60Hz, 1 Phase, 7A or
230V, 50Hz, 1 Phase,
3.5A |
