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Silane Coating for MEMS

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YIELD Engineering Systems Inc.

YES home page
SILANE COATING FOR MEMS 

YES 1224 chemical vapor deposition (CVD) system

For MEMS device packaging, a hydrophobic coating reduces stiction, the undesired static friction that wears down devices. Minimizing this stiction goes a long way towards increasing device reliability and longevity as well as preventing damaging lock-up, which occurs when the device flexes and sticks to itself.

The YES-1224 & 1224P (w. plasma) chemical vapor deposition systems are ideally suited for surface coating of MEMS devices.
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Last modified: 2011-11-12