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Plasma systems are
effective for stripping polyimide and thick layers of photoresist, as
well as descumming, etching, and removing organics. Plasma is an ionized
gas capable of conducting electricity and absorbing energy from an
electrical supply. (Lightning and the Aurora Borealis are naturally
occurring examples of plasma). Manmade plasma is generally created in a
low-pressure environment.
In the case of an active gas such as Oxygen, ion bombardment as well as
chemical reactions occur. As a result, organic compounds and residues
volatilize and are removed. |
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